Sevenstar releases the new generation CS300 MFC for semiconductor marketing. Based on CS technology platform, CS300 is the latest generation designed especially for large scaled IC equipments byCS300 is the latest generation designed especially for large scaled IC equipments byCS300 is the latest generation designed especially for large scaled IC equipments byCS300 MFC has the DF based pressure compensation algorithm, improved surface finishing and Specification comply with SEMI standard, also 1.125" IGS W -seal and C-seal interface are available.
Features
Description
Powerful customer software comes standard with each model, while additional functions such as multi-gas，multi-range，auto-zero, alarms, soft start, and delay are available as customer selections.
Low Zero Drift and Temperature Coefficient
High Accuracy and Fast Response
The accuracy of the CS300 MFC has been improved to ±0.8% of S.P., and the most advanced models have a less than 0.5 sec response time.
Metal-Sealed Models and High Purity Feature
The invention of new sensor technology enables the CS230 MFC to maintain stability and withstand temperature fluctuations. Without an auto-zero amplifier, the expected zero drift is less than 0.6%F.S./year, and the temperature coefficient is less than 0.02%F.S./℃(zero)，0.05%F.S./ ℃ (span).
Compatible Interfaces
The special metal surface process is applied in CS300. 316 stainless steel VV is used and rough ness could be less than 5 RA which is required by the semi standards.
CS300 MFCs support 1.125", 1.5" W, C IGS.
The CS300 MFC is compatible with the following interfaces, which may be selected by the customer:±8V-±16V double-end power supply and +14V-+28V single-end power supply; digital or analog signal input and output; SEMI standard mechanical dimensions; and RS-485 or DeviceNetTM communications module.
Miscellaneous Functions
Specification
