KF - ISO - NW Flange Fittings

(Centering Rings)

Used to center and seal two flanges, in standard NW, KF and ISO sizes, centering ring flange fittings provide reliable vacuum seals within critical semiconductor environments.

PPE centering rings are available in both aluminium and stainless steel, and can be combined with O-ring materials commonly used in semiconductor wafer processing systems.  PPE O-ring materials include:-


 

  • FKM - up to 250°C (482°F) 

  • Nanofluor® - ultra-high purity, up to 260°C (500°F) 

  • Kimura® - high purity, up to +300°C (572°F) 

  • Perlast® FFKM - high purity, aggressive media, up to 325°C (617°F) 

See the table of standard sizes below.

Trapped centering adaptors are available on request.

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End-effector Pads

High purity, Perlast® and Kimura® materials are widely used in wafer handling applications as end-effector pads because they provide optimized friction to maintain wafer positional accuracy, and prevent particulation due to their wholly organic nature.

PPE are experts in providing elastomeric solutions and can help you optimize your designs using our materials expertise and advanced design tools, such as non-linear finite element analysis.

Custom designed wafer handling components ensure improved pad retention into mating hardware, simplified assembly and optimum friction to allow fast robotic handling.

 

The PPE range of materials includes elastomers with both low and high coefficients of friction, to allow tailoring of wafer retention force.  In addition, PPE offers dissipative end-effectors molded from unique elastomer materials to reduce electrostatic discharge (ESD) damage.

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T-Seals

T-seals offer an excellent sealing solution for static or reciprocating dynamic applications. T-seals can be designed to retro fit into existing O-ring grooves (both piston and rod orientations) or optimized for specific application requirements.

T-seals comprise of an elastomer T-shaped cross section and two backup rings made from an engineering grade plastic, often PTFE or PEEK.

The use of the backup rings allows the T-seal to be used in high pressure applications whilst still maintaining high sealing efficiency at low pressures. The design of the T-seal uses the system pressure to actively energise the backup rings, ensuring efficient extrusion resistance in single and bi-directional pressure applications, both in static and dynamic conditions.

Installation procedures for T-seals are often simplified over other seal designs due to their symmetrical geometry.

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L-Seals

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L-seals offer a cost effective alternative to T-seals for static or reciprocating dynamic applications where high gland fill may be a concern with T-seals. L-seals can be designed to retro fit into existing O-ring grooves (both piston and rod orientations) or optimized for specific application requirements.

Similarly to T-seals, L-seals comprise of an elastomer L-shaped cross section using a single backup ring made from an engineering grade plastic, often PTFE or PEEK.

The use of the backup ring allows the L-seal to be used in high pressure applications whilst still maintaining high sealing efficiency at low pressures. The design of the L-seal uses the system pressure to actively energise the backup ring, ensuring efficient extrusion resistance in single direction pressure applications in static and dynamic conditions.

X-Seals

X-rings (also known as quad rings or four-lobed seals) offer an alternative seal solution to O-rings for use in reciprocating dynamic or rotary applications. They are often used in applications where the seal is required to operate under lower pressure and temperature conditions. Under low pressure, high sealing efficiency can still be achieved with an X-ring as the mould parting line is not coincident with the primary sealing faces.

X-rings can typically be retrofitted into existing O-ring grooves with the size often based around the original O-ring size. The square envelope of the X-ring stops the seal from twisting and rolling, preventing spiral failure often seen when O-rings are used in reciprocating applications. X-rings can be manufactured to standard O-ring sizes, as well as custom sizes for specific applications.

X-rings can also offer a reduction in friction as trapped media between the lobes can provide lubrication to the sliding sealing face. For low pressure applications, the combination of a low modulus material and small cross section can help to reduce friction. In high pressure applications, the friction can be reduced by selecting a higher modulus material with a reduced coefficient of friction.

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D-Seals

D-rings offer another alternative seal solution to O-rings for use in reciprocating dynamic or rotary applications. They offer the same sealing characteristics as an O-ring and can be used in both low and high pressure application across a broad range of temperatures.

D-rings can typically be retrofitted into existing O-ring grooves with the size often based around the original O-ring size. The flat geometry on the base of the D-ring stops the seal from twisting and rolling, preventing spiral failure often seen when O-rings are used in reciprocating applications. D-rings can be manufactured to standard O-ring sizes, as well as custom sizes for specific applications.

For low pressure applications, the combination of a low modulus material and small cross section can help to reduce friction. In high pressure applications, the friction can be reduced by selecting a higher modulus material with a reduced coefficient of friction.

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Wiper seals

Wiper seals are typically used in conjunction with other sealing elements.

A wiper seals primary function is to provide a physical barrier to limit the ingress of moisture, dirt and other contaminants into the primary sealing system, preventing damage to hardware and seals.
Wiper seals require a snap in fit into a rod groove locations and compliment a primary sealing solution.

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Slit Valve Gates

PPE offers a range of profiles that maximize sealing integrity and life expectancy for
bonded and non-bonded slit valve gates fitted with Perlast® seals.

Perlast® gates maximize wafer yields and PM cycles by utilizing ultra-pure translucent perfluoroelastomers that do not
utilize inorganic filler systems such as metal oxides and silicas that can cause particulation in dynamic door applications.

Energised lip Seals

Wiper seals are typically used in conjunction with other sealing elements. A wiper seals primary function is to provide a physical barrier to limit the ingress of moisture, dirt and other contaminants into the primary sealing system, preventing damage to hardware and seals.
Wiper seals require a snap in fit into a rod groove locations and compliment a primary sealing solution.Energised lip seals comprise of a high modulus elastomer, (or high grade engineering plastic) jacket and a low modulus elastomer O-ring energiser. The low modulus O-ring energises the jacket under low pressure conditions to increase the sealing force allowing them to be used in low and high pressure applications.


Energised lip seals provide a versatile sealing system for uni-directional pressure applications in either static or reciprocating dynamic conditions. Energised lip seals are symmetric in their cross section and so they can be used in both rod or piston grooves. Backup rings can be used in conjunction with energised lip seals to enhance extrusion resistance.


There are various profiles of energised lip seals available with differing qualities depending on application requirements.

Slit valve gates produced

to your requirements


Custom molded formed O-rings, which follow the path of a rectangular groove, greatly extend seal-life by reducing stress levels
experienced by toroidal O-rings in the corners.

PPE can help optimize groove design to accommodate seals with circular cross section or
can offer retro-fit solutions for existing hardware.

For new applications PPE Engineers can provide design advice on how best to actuate and control the door, in order to prevent leakage and maximize the effective life of the seal.

Large door seals for FPD and Solar panel manufacturing equipment are available as fully molded parts.