Features
Description
Powerful customer software comes standard with each model, while additional functions such as multi-gas，multi-range，auto-zero, alarms, soft start, and delay are available as customer selections.
Low Zero Drift and Temperature Coefficient
High Accuracy and Fast Response
The accuracy of the CS200 MFC has been improved to ±1.0% of S.P., and the most advanced models have a reduced response time of less than 0.8 sec.
Metal-Sealed Models and High Purity Feature
The invention of new sensor technology enables the CS200 MFC to maintain stability and withstand temperature fluctuations. Without an auto-zero amplifier, the expected zero drift is less than 0.6%F.S./year, and the temperature coefficient is less than 0.02%F.S./℃(zero)，0.05%F.S./ ℃ (span).
Compatible Interfaces
The wetted flow path of-the-the-line CS200 MFC is constructed from surface-passivated stainless steel. All CS200 MFCs are assembled in Sevenstar’s ultraclean Class 100-class cleanrooms in accordance with both SEMI and ISO 9001 standards.
Miscellaneous Functions
The CS200 MFC is compatible with the following interfaces, which may be selected by the customer:±8V-±16V double-end power supply and +14V-+28V single–end power supply; digital or analog signal input and output; SEMI standard mechanical dimensions; and RS-485 or DeviceNet communications module.
Specification
